| http://www.w3.org/ns/prov#value | - In another aspect of the present invention, there is provided a micro-machine switch unit including (a) a substrate, (b) first to N-th micro-machine switches wherein N is an integer equal to or greater than 2, and (c) a common signal line and first to N-th signal lines all formed on the substrate, a K-th micro-machine switch electrically connecting the common signal line to a K-th signal line and
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