| http://www.w3.org/ns/prov#value | - In addition, as the insulating films 1130, 1132, and 1134, a single layer structure or a multilayer structure of insulating films containing nitrogen or oxygen such as silicon oxide (SiOx), silicon nitride (SiNx), silicon oxynitride (SiOxNy) (x>y), silicon nitride oxide (SiNxOy) (x>y), or a film containing carbon such as DLC (diamond like carbon), further, an organic material such as epoxy, polyim
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