| http://www.w3.org/ns/prov#value | - In the fifth and sixth embodiments, as the base substrate 22, a so-called dummy grade silicon wafer whose resistance value is off-specification is employed; however, besides this it is also possible to use wafers discarded after being used in an LSI manufacturing plant, a research laboratory or the like for purposes such as adjustment or testing or the like of manufacturing apparatuses or test app
|
