| http://www.w3.org/ns/prov#value | - In another embodiment, the present invention is an article that is useful for protecting a reticle from electrostatic damage and is comprised of a pellicle that has an anti-static layer on both its sides which are perpendicular to incident exposing radiation and a rectangular metal frame which is attached to the pellicle on one of its open ends and has an anti-static layer on its sides which are p
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