| http://www.w3.org/ns/prov#value | - In the prior art, it is necessary that the light flux is propagated in the direction parallel to the electrode surface or heater surface, but in the present invention this is not necessary, that is, the light flux may be incident on the heater surface at a right angle or other angle and therefore, there is not such a limitation as above with respect to arrangement upon assembling light modulation
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