| http://www.w3.org/ns/prov#value | - In its other, disruptive, embodiment, MEMS technology creates entirely new kinds of products, such as inexpensive, multi-axis inertial motion sensors useful for smartphone-based navigation, and Digital Micromirror Devices (DMD), arrays of MEMS micromirrors used for high speed, efficient, and reliable spatial light modulation in industrial, medical, telecom, security, and other applications.What is
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