| http://www.w3.org/ns/prov#value | - In the case of measuring the characteristics of each resonating element 1 on the piezoelectric substrate wafer of such a configuration as described above, probe pins of non-shown measurement equipment are not directly held in contact with the connecting pads 12 a, 12 b??? or 12 a???, 12 b, but instead they are contacted with the dummy connecting pads 51 disposed adjacent the connecting pads separa
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