| http://www.w3.org/ns/prov#value | - In the case of another valve unit, this portion is referred to as a valve body portion instead of being called the valve body substrate 5. [0062] Here, as the material of the valve body substrate 5 and the lower substrate 5 b, it is possible to use any one of an inorganic material such as glass or a ceramic, a resin or the like, and metals in general, e.g., a ferroalloy, stainless steel, and alumi
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