| http://www.w3.org/ns/prov#value | - One class of ferroelectric materials that has performed well in tests of the present invention is a ceramic piezoelectric material known as lead zirconate titanate, which has sufficient stiffness such that piezo-diaphragm 10 maintains a symmetric, out-of-plane displacement as will be described further below. [0060] Ferroelectric material 12 is typically a composite material where the term ???compo
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