| http://www.w3.org/ns/prov#value | - In this embodiment mode, the thermal treatment is carried out at 410??? C. As the insulating films 167 and 168, a material selected from aluminum nitride (AlN), aluminum oxynitride (AlON), aluminum nitride oxide (AlNO) containing more nitrogen than oxygen, aluminum oxide, diamond-like carbon (DLC), nitrogen-containing carbon (CN), polysilazane, or other substances containing an inorganic insulatin
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