About: http://webisa.webdatacommons.org/26674031

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a flow chart of a method for filtering temperature anomalies in semiconductor thermal processes, according to an embodiment of the invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com