| http://www.w3.org/ns/prov#value | - In the method and system, an imaging modality such as a ct scanner is used to obtain an image sequence that is then processed using a computer program. 09/11/1420140253912Defect inspection for sameIn defect scanning carried out in a process of manufacturing a semiconductor or the like, a light detection optical system comprising a plurality of photosensors is used for detecting scattered light ref
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