| http://www.w3.org/ns/prov#value | - One way to achieve the formation of a compliant substrate includes first...http://www.google.com/patents/US20020003239?utm_source=gb-gplus-sharePatent US20020003239 - Semiconductor structure and device including a carbon film and method of forming the sameAdvanced Patent SearchPublication numberUS20020003239 A1Publication typeApplicationApplication numberUS 09/824,615Publication dateJan 10, 2002Fi
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