About: http://webisa.webdatacommons.org/266948986

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In plasma processes, metals such as sodium and iron, when they are present in photoresists, can cause contamination especially during plasma stripping.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com