| http://www.w3.org/ns/prov#value | - In one embodiment, patterning agent 1315 is a material that absorbs, reflects or scatters electromagnetic radiation directed onto photomask 1305 and, therefore, the shapes and physical dimensions of relief features 1308 and recessed regions 1307 establishes two dimensional spatial distributions of intensities, wavelengths and/or polarization states of electromagnetic radiation transmitted to photo
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