| http://www.w3.org/ns/prov#value | - FIG. 12A is a plan view depicting the glass substrate 64A, which is a key section of another example of the illumination system measuring device 63, FIG. 12B is a side view thereof, FIG. 12C is a front view thereof, and as FIG. 12A-FIG. 12C show, the pin hole 64 a and the slit 64 b, which is elongated in the scanning direction SD (Y direction), are formed in a line along the non-scanning direction
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