| http://www.w3.org/ns/prov#value | - Another exposure method according to the present invention is a method which uses an x-ray source which generates x-rays by generating of a plasma of a target substance and uses the x-ray as exposure light; and the method adjusts the position of the x-ray source using light other than the x-rays, such as visible light, generated by the x-ray source concurrently with the x-rays; and then performing
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