| http://www.w3.org/ns/prov#value | - In FIG. 3B, the substrate 11 is subjected to interdiffusion and/or annealing of the precursors DP deposited in FIG. 3A. This produces a further redistribution of the precursors DP. In FIG. 3C, the interdiffused precursors of FIG. 3B are combined with ion beam sputter-assisted carbon, oxygen, nitrogen, carbon, halogen or other selected compounds to provide carbidized, nitridized, oxidized, halogena
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