| http://www.w3.org/ns/prov#value | - In this case, the reference surface is a surface that serves as a reference to displacement ??Zo of wafer stage WST in the Z-axis direction measured by interferometer system 118, and in the embodiment, the surface is to coincide with the image plane of projection optical system PL. For the correction of the error described above, it is necessary to accurately obtain the difference of height (the s
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