| http://www.w3.org/ns/prov#value | - In one aspect, an embodiment is a method of processing a substrate, comprising polishing a substrate having a polysilicon layer disposed on an oxide layer, the oxide layer defining trenches in the substrate and field areas on the substrate, with a polishing composition, the polishing composition comprising a polymeric surfactant and an abrasive selected from the group consisting of alumina and cer
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