| http://www.w3.org/ns/prov#value | - In accordance with one or more embodiments of the present invention, substrate tiles 110 are held in X and Y position, for example and without limitation, with respect to adjacent ones of substrate tiles 110 so that probe tips 122 are held in X and Y registration in test plane 118, and substrate tiles 110 are aligned so that probe tips 122 thereon are substantially coplanar to test plane 118 (i.e.
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