| http://www.w3.org/ns/prov#value | - ng Cu on said at least one of said trench and said contact hole to form a conductive film; heat-treating said conductive film in an atmosphere with a reduced pressure, the atmosphere including at least an oxygen gas as an oxidizing gas and a hydrogen gas as a reducing gas to cause an exothermic region so that said conductive film flows and fills said at least one of said trench and said contact ho
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