| http://www.w3.org/ns/prov#value | - ng in the mask, the target opening dimension of the concave portion to be formed, and the first and second correlations; and conducting an etching process to the object to be processed, so as to make the etchingprocess parameter correspond to the target etching parameter value, wherein the etching process is conducted by using at least two types of etching gases, and the etching process parameter
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