| http://www.w3.org/ns/prov#value | - n the substrate in a direction inclined with respect to a direction perpendicular to the surface of the substrate, the irradiating means including a polarized laser source for generating a polarized laser beam, a focus lens for focusing the polarized laser beam on the substrate as a polarized laser beam spot, and scanning means for linearly scanning the polarized laser beam spot on the substrate;
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