| http://www.w3.org/ns/prov#value | - One alternate embodiment of the present invention is the use of alternative means for introducing various ions or atoms or molecules into a wafer; one example is an ion-exchange process for driving large amounts of foreign atoms from the surface to a predetermined fracture depth by imposing a voltage on the wafer in a solution of the desired ions; for instance an acidic solution for protons; or ot
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