| http://www.w3.org/ns/prov#value | - Another example is a method in which the mask material used to form the diffraction grating has a structure comprising two or more layers, with a material having low selectivity for a resist is used for the lower layer, and a material having a high selectivity for a resist is used for the upper layer, a pattern corresponding to the diffraction grating is transferred from a resist to this mask mate
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