PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In an electron irradiation processing apparatus, means forming a vacuum chamber, means forming an electron discharge device disposed in said chamber, a high voltage power supply including means for pulsing said electron discharge device at a rate greater than about 1 pulse per second, a cold cathode capable of plasma emission of electrons disposed within said electron discharge device, means formi
http://www.w3.org/ns/prov#wasQuotedFrom
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