| http://www.w3.org/ns/prov#value | - In either case, in which the flow restrictors are integral with a substrate or with a microchip body mounted on a substrate, the fabrication of the integral flow restrictors can be effected using typical microfluidic microfabrication techniques, preferably in silicon, including for example, techniques selected from the group of oxidation, making, etching, thin-film deposition, planarization and bo
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