About: http://webisa.webdatacommons.org/267486498

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, the fourth embodiment is especially effective when there is a problem that a substrate end portion is retreated backward by wet-etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr