| http://www.w3.org/ns/prov#value | - Fiducial surfaces are also provided on the substrate-holder support 19 to restrict motion in the x and y axes, and the substrate-holder 18 is urged by a spring, a magnet, a vacuum or other compliant or biasing means against these surfaces. d) Providing a precisely-milled or ground flat bottom on the substrate-holder 18 designed to engage a precisely-milled or ground flat surface on the substrate-h
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