About: http://webisa.webdatacommons.org/267623122

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a diagrammatic depiction of an atomic layer deposition apparatus in accordance with an aspect of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com