About: http://webisa.webdatacommons.org/267674725

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	With the cleaning liquid mediums of the invention, particulate contaminants present on substrates to be cleaned, such as silicon wafers, can be efficiently removed to a high degree in a short time period.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au