About: http://webisa.webdatacommons.org/267679124

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a flow chart depicting a first method 400 of detecting defects in a microminiature pattern repeated over a particular surface area of an object in accordance with an embodiment of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk