About: http://webisa.webdatacommons.org/267688432

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1B is a block diagram illustrating a group of modules used to form copper conductive lines on an integrated circuit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com