About: http://webisa.webdatacommons.org/267829869

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 14 is a cross-sectional view for describing a problem of the former manufacturing method of a semiconductor device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com