| http://www.w3.org/ns/prov#value | - ice fabrication by differential pressure, and more particularly, to an apparatus for controlling flow rate of gases used in semiconductordevice fabrication by generating differential pressure in a flow passage through which the gas flows.BACKGROUND ARTAs well known, semiconductor device fabrication employs gases such as dopant gas, etchant gas, diffusion gas and purge gas used for manufacturing se
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