About: http://webisa.webdatacommons.org/267909465

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a side sectional view of a wafer portion having the prior art overlay metrology pattern of FIG. 1, illustrating a test pattern that has been rendered asymmetric by a planarization (CMP) process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com