About: http://webisa.webdatacommons.org/268107774

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Etch stop layer 16 may be made of any suitable material such as silicon nitride, Si3N4, or titanium oxide, TiO, or aluminum oxide, Al2O3.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com