About: http://webisa.webdatacommons.org/268113111

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other processes, such as modified chemical vapor deposition (MCVD) or vapor axial deposition (VAD) or plasma chemical vapor deposition (PCVD) may be used, either alone or in combination with any other deposition process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com