About: http://webisa.webdatacommons.org/268113643

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is to be noted that the heating temperature, the heating time, and other conditions are required to be set in such a way that the amorphous silicon film is not crystallized and that the used substrate is not deformed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com