About: http://webisa.webdatacommons.org/268194069

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is known in the art to spray certain types of fluids on the polishing surface 42 of a platen 40 for purposes of a polishing operation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es