About: http://webisa.webdatacommons.org/268408769

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, the first ashing is a process to uniformly and accurately remove the photoresist 2, and therefore, it is difficult to adopt other methods except ashing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com