About: http://webisa.webdatacommons.org/268626379

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, the reactants including fluorosilane (SiHxF4-x) and ammonia (NH3) are applied by a flow into chamber 40.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com