About: http://webisa.webdatacommons.org/268677285

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some embodiments of the invention the test environment is returned to ambient conditions in a controlled manner before removal of the wafer, in order to avoid the formation of water droplets on the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com