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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In yet another exemplary embodiment such as shown in FIG. 2, thermophoretic deposition techniques may be used to deposit the silicon nanoparticles from the oxidized aerosol directly onto a substrate surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com