About: http://webisa.webdatacommons.org/268740959

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another object is a process for achieving a planar insulating film of silicon dioxide entirely across a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca