About: http://webisa.webdatacommons.org/268759189

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another aspect, the invention features a method for forming a structure, the method including providing a substrate comprising a crystalline material, and forming a first masking layer over the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es