About: http://webisa.webdatacommons.org/268789752

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In order to provide back-side contact points for vias 107 and 108, portions of substrate 100 are removed, through a process, such as etching, CMP, or the like, to reveal contact points with vias 107 and 108.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es