About: http://webisa.webdatacommons.org/268819394

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this example, as described later, the first and the second electrodes 5114 and 5115 are formed of polysilicon including phosphorus doped thereto by thermal diffusion at a density of 1???1019 cm-3 or more.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com