About: http://webisa.webdatacommons.org/269037458

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the case that the material is a silicon nitride film, a silicon nitride oxide film, or a laminate film thereof all formed by plasma CVD or sputtering, then the material especially has a gettering effect.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com